ポジ型フォトレジスト液用容器

Container for positive type photoresist liquid

Abstract

(57)【要約】 【課題】 破損しにくく、軽量であり、しかも保存及び 輸送中にポジ型フォトレジスト液が変質しないような、 容器を提供する。 【解決手段】 ポリエチレン又はエチレン・α−オレフ ィン共重合体より成ることを特徴とするポジ型フォトレ ジスト液容器。
PROBLEM TO BE SOLVED: To obtain a container light in weight and moreover causing no deterioration of quality of a photoresist liquid contained therein during storage and transport by forming the container for a positive type photoresist liquid composed of an organic solvent of polyetylene or an ethylene.α-olefin copolymer. SOLUTION: A container which is used for storing and transporting a positive type photoresist liquid to be used for the fine processing of semiconductor elements, etc., of integrated circuits, etc., is formed of polyethylene or an ethylene.α-olefin copolymer. As the polyethylene, high-density polyethlene having the density of 0.93-0.97g/cm<3> is used. Further, in the case of using the ethylene.α- olefin copolymer, for example, propylene, butene-1,4-methylpentene-1,hexene-1, octene-1, etc., are used as α-olefin to be copolymerized with ethylene, and the content of an α-olefin unit in the copolymer is made at most 15wt.%.

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