薄膜磁気ヘッド

Abstract

PURPOSE: To drastically decrease compressive stresses and to eliminate defects, such as peeling of insulating films and crack of substrates, by forming a thin-film magnetic head by laminating nonmagnetic inorg. insulating material thin films for embedding coils essentially consisting of SiO2 and nonmagnetic inorg. insulating material thin films exclusive of these thin films. CONSTITUTION: This thin-film magnetic head has a lower magnetic core 3 and upper magnetic core 16 on the substrate 1 consisting of a nonmagnetic material and an intermediate core 10 disposed to constitute a magnetic gap at one end of both upper and lower magnetic cores 3, 16. A conductor material is packed into the space part including a coupling magnetic path 11 for connecting the other ends of both magnetic cores 3, 16 and the space part including the space between both magnetic cores 3 and 16 around the position of the coupling magnetic path 11 as the winding central position in such a manner that the coil 14 having a prescribed coil pattern is disposed to be embedded into the nonmagnetic inorg. insulating material thin films 2, 9, 12. The magnetic head has such grooves 13 in which the coil 14 having the prescribed coil patterns 6 is constituted in the nonmagnetic inorg. insulating material thin films. The nonmagnetic inorg. insulating material thin films 12 for embedding the coil essentially consisting of the SiO2 and the nonmagnetic inorg. insulating material thin films 17 exclusive of these thin films 12 are laminated to constitute the thin-film magnetic head.
(57)【要約】 【目的】 製作時における加熱工程を経ても、膜剥離、 基板割れ、磁性膜の磁気特性の劣化等が生じない薄膜磁 気ヘッドを提供する。 【構成】 下部磁気コア3と上部磁気コア16との一端 部に磁気空隙を構成させるための中間磁気コア10と、 他端部の結合磁路11と、前記の結合磁路11の位置を 巻回中心とし、上部,下部の両磁気コア3,16間の空 間を少なくとも含む空間部内に、所定コイルパターンの コイル14が非磁性の無機絶縁材料薄膜12中に埋設さ れた状態となるように導電体材料が充填される溝13が 設けられるコイル埋設用の非磁性の無機絶縁材料薄膜1 2の材料として、SiO2を主成分とする非磁性の無機 絶縁材料を用い、前記の非磁性の無機絶縁材料薄膜12 以外の非磁性の無機絶縁材料薄膜2,9,15,17と してはAl2O3を用い、全体の内部応力を小さくし、ま た薄膜磁気ヘッドの製作時の加熱工程を経ても、膜剥 離、基板割れ、磁性膜の磁気特性の劣化等の問題が生じ ないようする。

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    Publication numberPublication dateAssigneeTitle
    JP-2007523776-AAugust 23, 2007サン−ゴバン グラス フランス疎水性表面を有し、当該疎水性の耐久性が改良されたガラス基材などの基材
    US-7190553-B2March 13, 2007Alps Electric Co., Ltd.Thin-film magnetic head having lower magnetic pole layer and insulator layer behind the lower magnetic pole layer in the direction of height of the pole layer, and method for manufacturing the thin-film magnetic head